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Using the Scanning Probe Microscope in its Atomic Force Microscopy mode, local oxidation has been induced over surfaces of Titanium Nitride (TIN) films. Oxidation was generated by using a probe made of gold-coated silicon, and another one coated with diamond. Applying a negative voltage to the substrate has permitted the generation of Titanium Oxide lines over the surface of the TiN film. The width of the oxidation patterns changes with relative humidity, with dimensions at 618 ran and 418 nm approximately for 85 % and 78 % of relative humidity, respectively. The height of patterns is relatively constant (8 nm approximately). [ABSTRACT FROM AUTHOR]