14 results on '"Friedrich, Christoph M."'
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2. Alternating phase-shifting mask application: effect of width and geometry of shifters, 3D EMF simulation and experimental verification
3. Rigorous diffraction analysis for future mask technology
4. Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling
5. Defect printability and repair of alternating phase-shift masks
6. Proximity effects of alternating phase-shift masks
7. Transmission and phase balancing of alternating phase-shifting masks (5x): theoretical and experimental results
8. Integration of alternating phase-shift mask technology into optical proximity correction
9. Evaluating the potential of alternating phase-shift masks using lithography simulation
10. FIRM: a new software tool for calibration of lithography simulation
11. Mask specifications and OPC
12. Benchmarking of software tools for optical proximity correction
13. High-NA illumination: a simulation study
14. Process proximity correction using an automated software tool
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