Author: "Lu, Claire" / Publisher: spie - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Lu, Claire"' showing total 2 results

Start Over Author "Lu, Claire" Publisher spie

2 results on '"Lu, Claire"'

1. Innovative applications: extending photomask registration tool for critical dimension measurement to achieve high efficiency

Author: Yu, Yifei, primary, Zeng, Jinghua, additional, Wang, Le, additional, Chen, Wei, additional, Holl, Christian, additional, Lu, Claire, additional, Cha, Phil, additional, Chang, Vic, additional, Tsai, Robert, additional, Wei, Jerry, additional, and Yuan, Lynne, additional
Published: 2023
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2. The application of reticle analyzer in DRAM fab

Author: Chou, Asei, primary, Hsu, Wenhao, additional, Lan, Andy, additional, Fang, Jason, additional, Lu, Claire, additional, Yu, Harper, additional, Lei, Zeyu, additional, Li, Catherine, additional, Liu, Yanghui, additional, and Tolani, Vikram, additional
Published: 2021
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