1. Local Anodic Oxidation of Silicon for Create Crossbar Architecture.
- Author
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Polyakova, V. V. and Saenko, A. V.
- Subjects
- *
TITANIUM oxidation , *TITANIUM oxides , *OXIDATION , *TITANIUM , *SILICON - Abstract
Paper present possibility of creation a neuromatrix in the form crossbar architecture on a silicon substrate is shown. Crossbar architecture in the form of a set of nanosized conductors, between which there is a layer of titanium oxide, capable of changing its conductivity under the action of the applied voltage, it is proposed to form using the metho d of local anodic oxidation. The results is present of the study technological parameters of the metho d of local anodic oxidation silicon and titanium for the implementation of the elements of this neuromatrix in the form of a memristor structures. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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