1. Light and matter co-confined multi-photon lithography.
- Author
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Guan, Lingling, Cao, Chun, Liu, Xi, Liu, Qiulan, Qiu, Yiwei, Wang, Xiaobing, Yang, Zhenyao, Lai, Huiying, Sun, Qiuyuan, Ding, Chenliang, Zhu, Dazhao, Kuang, Cuifang, and Liu, Xu
- Subjects
LITHOGRAPHY ,OPTICAL diffraction ,FREE radicals - Abstract
Mask-free multi-photon lithography enables the fabrication of arbitrary nanostructures low cost and more accessible than conventional lithography. A major challenge for multi-photon lithography is to achieve ultra-high precision and desirable lateral resolution due to the inevitable optical diffraction barrier and proximity effect. Here, we show a strategy, light and matter co-confined multi-photon lithography, to overcome the issues via combining photo-inhibition and chemical quenchers. We deeply explore the quenching mechanism and photoinhibition mechanism for light and matter co-confined multiphoton lithography. Besides, mathematical modeling helps us better understand that the synergy of quencher and photo-inhibition can gain a narrowest distribution of free radicals. By using light and matter co-confined multiphoton lithography, we gain a 30 nm critical dimension and 100 nm lateral resolution, which further decrease the gap with conventional lithography. Mask-free multi-photon lithography allows the straightforward fabrication of nanostructures, but high precision and good resolution can be challenging to achieve. Here, the authors report a combination of photo-inhibition and chemical quenchers for improved lithography performance. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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