1. Light scattering effect of ITO:Zr/AZO films deposited on periodic textured glass surface morphologies for silicon thin film solar cells
- Author
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Didier Pribat, Anh Huy Tuan Le, Junsin Yi, Chonghoon Shin, Shahbaz Khan, S. Velumani, Shihyun Ahn, Hyeongsik Park, Shahzada Qamar Hussain, Jayapal Raja, Aamir Razaq, Nagarajan Balaji, Gi Duk Kwon, Sangho Kim, Sunbo Kim, and Youn-Jung Lee
- Subjects
Amorphous silicon ,Materials science ,Haze ,business.industry ,Bilayer ,General Chemistry ,Light scattering ,Wavelength ,chemistry.chemical_compound ,Optics ,chemistry ,Electrode ,General Materials Science ,Composite material ,business ,Sheet resistance ,Transparent conducting film - Abstract
Various SF6/Ar plasma-textured periodic glass surface morphologies for high transmittance, haze ratio and low sheet resistance of ITO:Zr films are reported. The SF6/Ar plasma-textured glass surface morphologies were changed from low aspect ratio to high aspect ratio with the increase in RF power from 500 to 600 W. The micro- and nano-size features of textured glass surface morphologies enhanced the haze ratio in visible as well as NIR wavelength region. Micro-size textured features also influenced the sheet resistance and electrical characteristics of ITO:Zr films due to step coverage. The ITO:Zr/AZO bilayer was used as front TCO electrode for p-i-n amorphous silicon thin film solar cells with current density–voltage characteristics as: V oc = 875 mV, FF = 70.90 %, J sc = 11.31 mA/cm2, η = 7.02 %.
- Published
- 2015
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