1. Toward a better understanding of synthesis and processing of ceramic/self-assembled monolayer bilayer coatings
- Author
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S. Zarembo, Junghyun Cho, Tolulope O. Salami, K. Chitre, Scott R. J. Oliver, and Q. Yang
- Subjects
Chemistry ,Bilayer ,Mineralogy ,Self-assembled monolayer ,engineering.material ,Condensed Matter Physics ,Silane ,Electronic, Optical and Magnetic Materials ,Template reaction ,chemistry.chemical_compound ,Coating ,Chemical engineering ,visual_art ,Monolayer ,Materials Chemistry ,visual_art.visual_art_medium ,engineering ,Ceramic ,Electrical and Electronic Engineering ,Layer (electronics) - Abstract
Ceramic/self-assembled monolayer (SAM) bilayer coatings can provide adequate protection for silicon devices, or act as a multipurpose coating for other electronic applications, due to synergistic effects by forming a hybrid coating structure. The organic SAM layer acts as a “template” for the growth of the ceramic layer, while the ceramic layer can provide protection from environmental and mechanical impact. Low-temperature solution-based deposition techniques, namely, an in-situ solution method (biomimetic) and a hydrothermal method, have been employed in this study. Specifically, phosphonate-based (diethyl phosphatoethyl triethoxy silane) SAMs were used as a template to generate a zirconia ceramic layer at low temperatures. Other organic templates such as -SiCl3-, -OH-, -HSO3-, or -CH3-terminated SAMs were also examined. The reactions to grow the ceramic film were found to be pH sensitive. The ceramic and SAM coatings were characterized by a variety of analytical techniques. A pathway for the formation of the ceramic coating is also discussed.
- Published
- 2005
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