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Nucleation of Ge islands on a stepped Si(100) surface is studied. It is shown by diffraction of fast electrons that at a temperature of 600°C, constant flux of Si, and deposition rate of 0.652 Å/s, a series of the 1×2 superstructure reflections completely disappears, if the Si (100) substrate deviated by an angle of 0.35° to the (111) face is preliminarily heated to 1000°C. The disappearance of the 1×2 superstructure reflexes is due to the transition from the surface with monoatomic steps to that with diatomic ones. Investigations of the Ge islands’ growth were carried out on the Si(100) surface preliminarily annealed at temperatures of 800 and 1000°C. It is shown that the islands tend to nucleate at the step edges.

Growth of SiSn compounds with a Sn content from 10 to 35% is studied. The morphology and surface structure of the SiSn layers are examined and the kinetic diagram of the morphological state of SiSn films is established in the temperature range of 150–450°C. During the growth of SiSn films from 150 to 300°C, oscillations of specular beam were observed. For the first time, periodic multilayer SiSn/Si structures with pseudomorphic monocrystalline SiSn layers with the Sn content from 10 to 25% are grown. The c(8×4) and (5×1) superstructures are identified during the growth of Si on the SiSn layer and the conditions are determined for the formation of the desired Si surface structure by controlling the growth temperature. From the diffraction reflection curves, the lattice parameter, the SiSn composition, and the period in the multilayer periodic structure are defined, which with high precision correspond to the specified values.

The algorithm allowing us to study the independent stress control problems in deformable heterogeneous systems with prescribed eigenstrains is considered. The independent stress control means the creation of a desired stress field in the system by eigenstrains in such way that the total deformation in the system remains unchanged. Within the framework of the algorithm, we perform the mathematical formalization of the constraints connected with the distribution of eigenstrains. The existence theorem is proved for the solution of the independent stress control problem under constraints and the procedure of determination of the optimal parameters of eigenstrains is proposed in the case where the indicated solution exists.