Author: "Choi, Sang-Hyeok" / Publisher: the electrochemical society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Choi, Sang-Hyeok"' showing total 3 results

Start Over Author "Choi, Sang-Hyeok" Publisher the electrochemical society

3 results on '"Choi, Sang-Hyeok"'

1. Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O2

Author: Hong, Tae Eun, primary, Choi, Sang-Hyeok, additional, Yeo, Seungmin, additional, Park, Ji-Yoon, additional, Kim, Soo-Hyun, additional, Cheon, Taehoon, additional, Kim, Hoon, additional, Kim, Min-Kyu, additional, and Kim, Hyungjun, additional
Published: 2012
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2. Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects

Author: Cheon, Taehoon, primary, Choi, Sang-Hyeok, additional, Kim, Soo-Hyun, additional, and Kang, Dae-Hwan, additional
Published: 2011
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3. Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating

Author: Choi, Sang-Hyeok, primary, Cheon, Taehoon, additional, Kim, Soo-Hyun, additional, Kang, Dae-Hwan, additional, Park, Gye-Soon, additional, and Kim, Sunjung, additional
Published: 2011
Full Text: View/download PDF

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