Author: "Naoshi Sakuma" / Publisher: the japan society of applied physics - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Naoshi Sakuma" Publisher the japan society of applied physics

Author: M. Takahashi, Akihiro Kajita, Y. Yamazaki, Hisao Miyazaki, Kazuyoshi Ueno, Masayuki Katagiri, R. Matsumoto, Daisuke Nishide, T. Matsumoto, T. Sakai, Naoshi Sakuma, and R. Ifuku
Subjects: Metal, Interconnection, Materials science, visual_art, Doping, Intercalation (chemistry), visual_art.visual_art_medium, Nanotechnology, Cvd graphene
Published: 2015
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Author: Y. Yamazaki, Akihiro Kajita, M. Takahashi, Naoshi Sakuma, Daisuke Nishide, R. Matsumoto, Makoto Wada, Hisao Miyazaki, Masayuki Katagiri, T. Sakai, Kazuyoshi Ueno, and T. Matsumoto
Subjects: Materials science, Quality (physics), Electrical resistivity and conductivity, Graphene, law, Doping, Nanowire, Nanotechnology, law.invention
Published: 2014
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Author: Naoshi Sakuma, Akihiro Kajita, Y. Yamazaki, Kazuyoshi Ueno, R. Kosugi, T. Sakai, Masaaki Suzuki, K. Imazeki, Masayuki Katagiri, and Hisao Miyazaki
Subjects: Materials science, Graphene, law, Nanotechnology, law.invention
Published: 2013
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Author: Akihiro Kajita, S. Kuwahara, Y. Yamazaki, H. Hanai, T. Sakai, Naoshi Sakuma, S. Baba, Y. Karasawa, and Kazuyoshi Ueno
Subjects: Heat resistant, Materials science, Graphene, law, Nanotechnology, Catalysis, law.invention
Published: 2012
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Author: Makoto Wada, Y. Yamazaki, Atsuko Sakata, T. Saito, Atsunobu Isobayashi, M. Kitamura, Masaaki Suzuki, Naoshi Sakuma, Masayuki Katagiri, T. Sakai, and Akihiro Kajita
Subjects: Materials science, Stack (abstract data type), Graphene, law, Catalytic metal, Nanotechnology, Layer (electronics), law.invention
Published: 2012
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Author: Yuji Awano, Shintaro Sato, Mariko Suzuki, Takashi Hyakushima, Tadashi Sakai, Masayuki Katagiri, Mizuhisa Nihei, and Naoshi Sakuma
Subjects: Interconnection, Materials science, Physics and Astronomy (miscellaneous), Uniform - quality, General Engineering, Electrical Evaluation, General Physics and Astronomy, Nanotechnology, Chemical vapor deposition, Carbon nanotube, Combustion chemical vapor deposition, Multiwalled carbon, law.invention, Plasma-enhanced chemical vapor deposition, law, Chemical-mechanical planarization, Remote plasma, Composite material
Abstract: Multiwalled carbon nanotubes (CNTs) have been grown by remote plasma-enhanced chemical vapor deposition at temperatures as low as 400 °C. In via formation, the selective growth of CNT bundles in via holes at 430 °C and chemical mechanical polishing for planarization have been performed. The electrical evaluation of CNT single vias with various diameters reveals that the via resistance is inversely proportional to the via area. This result indicates that the CNTs are grown with uniform quality and density in the via holes with various diameters and stable contact formations are obtained. Moreover, the resistances of single vias are approximately equivalent to the via resistances estimated from the resistances of via chains, demonstrating the via-to-via uniformity of the CNT vias obtained by the remote plasma-enhanced chemical vapor deposition.
Published: 2007
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Author: Tomio Ono, Masayuki Katagiri, Satoshi Koizumi, Naoshi Sakuma, T. Sakai, H. Yoshida, and Masaaki Suzuki
Subjects: Materials science, business.industry, engineering, Diamond, Optoelectronics, Schottky diode, Nanotechnology, engineering.material, business
Published: 2005
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