1. Orientation Dependency of Dislocation Generation in Si Growth Process
- Author
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Koichi Kakimoto, Hirofumi Harada, Yoshiji Miyamura, Karolin Jiptner, Bing Gao, and Takashi Sekiguchi
- Subjects
Materials science ,Silicon ,Condensed matter physics ,Infrared ,chemistry.chemical_element ,Crystal growth ,Slip (materials science) ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Crystal ,Crystallography ,chemistry ,General Materials Science ,Dislocation ,Growth orientation ,Directional solidification - Abstract
In an attempt to understand how and where dislocations are introduced into Si ingots by temperature gradients, bulk dislocation-free FZ crystals are exposed to temperature gradients similar to those in Bridgman Si crystal growth. This heat treatment introduces dislocations, which were analyzed using X-ray topography (XRT) and Scanning InfraRed Polariscopy (SIRP). Hereby, the orientation dependency is taken into account and ingots in (001) and (111) growth orientation are evaluated in this work. It can be found that the dislocation generation takes place at similar regions of the crystal and is independent of orientation, however, their propagation and multiplication differs. This leads to an overall different shape of the dislocation network. Especially intriguing are the long slip lines in the (111)-crystal, which cannot be found in the (001)-crystal. This suggests a different magnitude of slip propagation depending on the sample orientation. This effect should be explained by a different activation of slip systems and is discussed in the paper.
- Published
- 2015
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