1. Low-Duty-Ratio Patterning on a Heterogeneous Surface
- Author
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Myung-Il Kim, Dohan Kim, Jungha Park, and Hyunpyo Lee
- Subjects
Surface (mathematics) ,Materials science ,Nanotechnology ,Condensed Matter Physics ,medicine.disease_cause ,Electronic, Optical and Magnetic Materials ,Biomaterials ,Liquid film ,Duty cycle ,Mold ,Electrochemistry ,medicine ,Dewetting ,Micropatterning - Abstract
A thick film of patterned heterogeneous surface is introduced, in which the surface heterogeneity arises due to a difference in the characteristics of interfacial potential. When a liquid film is coated onto such a surface, the film is unstable only on certain parts of the surface and, consequently, dewetting takes place. In the other parts, the film is stable and no dewetting takes place. This heterogeneous surface is utilized for patterning low-duty-ratio patterns, which has proved challenging for any mold-based unconventional lithographies. Only the natural forces associated with capillarity and dewetting are responsible for the patterning. As a result, defect-free and uniform patterning is possible over a large area.
- Published
- 2005