1. Site‐specific angular dependent determination of inelastic mean free path of 300 keV electrons in GaN nanorods
- Author
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Jay Ghatak, Abhijit Chatterjee, and S. M. Shivaprasad
- Subjects
0303 health sciences ,Histology ,Materials science ,Electron energy loss spectroscopy ,Inverse ,02 engineering and technology ,Electron ,021001 nanoscience & nanotechnology ,Inelastic mean free path ,Pathology and Forensic Medicine ,03 medical and health sciences ,Transmission electron microscopy ,Angular dependence ,Nanorod ,Atomic physics ,0210 nano-technology ,Electron scattering ,030304 developmental biology - Abstract
Inelastic mean free path (IMFP) of the electron is a very important parameter for quantitative analysis of several electron spectroscopies and transport properties. In spite of being a fundamental material property, its experimental determination is not trivial due to complexity of the various electron scattering processes in matter. In this report, we demonstrate a procedure to determine the IMFP of 300 keV electrons in GaN, using the log-ratio technique where the local specimen thickness needs to be accurately known. The GaN nanorod morphology of the sample used here allows the accurate measurement of thickness by 'thickness map' under EFTEM measurements which enable the site specific determination of IMFP. IMFP for different collection semi angles have also been measured to validate the angular dependence. Our experimental results estimates the IMFP of GaN for 300 keV electrons to be 143 ± 11 nm at no-aperture condition and exhibit a strong inverse angular dependence at smaller collection semi angles (β20 mrad) and a near angular independence at larger collection semi angles (β30 mrad). We discuss these results in the light of three different theoretical models prevalent in the literature.The inelastic mean free path (IMFP) of electrons is defined as the average distance traveled between two successive inelastic collisions by an electron moving with a particular energy in a given material. It is a very fundamental material parameter for surface science and description of electron transport processes in solids. IMFP is particularly useful for quantifying several electron spectroscopies such as Auger electron spectroscopy, X-ray photoelectron spectroscopy, electron energy loss (EEL) spectroscopy and elastic peak electron spectroscopy etc. However, it is difficult to determine IMFP experimentally or theoretically as the interaction process has strong angular dependence that varies with electron energy, density and dielectric properties of the material. Particularly for EEL which is carried out in TEM at using electron with few hundred kilovolts, knowledge of IMFP at those high energies is required. In this report, we demonstrate a general procedure to determine IMFP of 300 keV electrons in Gallium Nitride inside TEM. Single crystalline Gallium Nitride nanorod has just been taken as an example to demonstrate the process. The procedure can be extended to any other materials of both crystalline and amorphous in nature.
- Published
- 2021
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