1. Confocal full-field X-ray microscope for novel three-dimensional X-ray imaging.
- Author
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Takeuchi, Akihisa, Terada, Yasuko, Suzuki, Yoshio, Uesugi, Kentaro, and Aoki, Sadao
- Subjects
X-ray microscopes ,THREE-dimensional imaging ,X-ray spectroscopy ,CONFOCAL fluorescence microscopy ,CROSS-sectional imaging - Abstract
A confocal full-field X-ray microscope has been developed for use as a novel three-dimensional X-ray imaging method. The system consists of an X-ray illuminating `sheet-beam' whose beam shape is micrified only in one dimension, and an X-ray full-field microscope whose optical axis is normal to the illuminating sheet beam. An arbitral cross-sectional region of the object is irradiated by the sheet-beam, and secondary X-ray emission such as fluorescent X-rays from this region is imaged simultaneously using the full-field microscope. This system enables a virtual sliced image of a specimen to be obtained as a two-dimensional magnified image, and three-dimensional observation is available only by a linear translation of the object along the optical axis of the full-field microscope. A feasibility test has been carried out at beamline 37XU of SPring8. Observation of the three-dimensional distribution of metallic inclusions in an artificial diamond was performed. [ABSTRACT FROM AUTHOR]
- Published
- 2009
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