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Hydrogen- and corrosion-induced microstructure and defects of ZnO single crystal under acidic conditions have been studied by using slow positron beam spectroscopy and microscopy techniques. Slow positron beam measurements revealed that a near-surface damaged region with a high concentration of defects was formed after hydrogen charging, but not after corrosion. The formation of hexagonal pyramids was found after electrochemical charging with hydrogen, while the formation of stepped hexagonal pits was observed after direct immersion in the solution. The incorporation of hydrogen by electrochemical charging enhanced the near-band-edge (NBE) emission intensity. [ABSTRACT FROM AUTHOR]