1. Time-Dependent Dielectric Breakdown on Subnanometer EOT nMOS FinFETs
- Author
-
Feijoo, Pedro C., Kauerauf, Thomas, Toledano-Luque, María, Togo, Mitsuhiro, Andrés, Enrique San, and Groeseneken, Guido
- Subjects
Condensed Matter - Mesoscale and Nanoscale Physics ,Physics - Applied Physics - Abstract
In this paper, the time-dependent dielectric breakdown (TDDB) in sub-1-nm equivalent oxide thickness (EOT) n-type bulk FinFETs is studied. The gate stacks consist of an IMEC clean interfacial layer, atomic layer deposition HfO2 high-k and TiN metal electrode. For the 0.8-nm EOT FinFETs, it is found that TDDB lifetime is consistent with results of planar devices for areas around 1e-8 cm2, implying that the FinFET architecture does not seem to introduce new failure mechanisms. However, for devices with smaller area, the extrapolated voltage at a ten-year lifetime for soft breakdown (SBD) does not meet the specifications, and as a consequence, the SBD path wear-out will have to be included in the final extrapolation. Furthermore, it is shown that for EOTs smaller than 0.8 nm, the TDDB reliability on n-type FinFETs is challenged by the high leakage currents., Comment: 15 pages, 7 figures
- Published
- 2024
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