1. The microstructure and characteristics of luminescent porous silicon film prepared by the physicochemical sonic-vacating method
- Author
-
Xiong Zu-Hong, Liu Yue, Liu Yi, Ding Xun-Min, Liao Tai-Chang, Shi Xiang-Hua, Liu Xiao-Bing, Ren Peng, and Hou Xiao-Yuan
- Subjects
Materials science ,Silicon ,General Physics and Astronomy ,chemistry.chemical_element ,Mineralogy ,Porous silicon ,Microstructure ,Anode ,Chemical engineering ,chemistry ,Etching (microfabrication) ,Ultrasonic sensor ,Electrochemical etching ,Luminescence - Abstract
The special physicochemical environment caused by sonic_vacating provides an important outlet for the preparation of highly efficient luminescent porous silicon films.Experimental results show that sonic_chemical treatment is an effective t echnology for the improvement of the microstructure of porous silicon,and the luminescent efficiency and stability thereof.Luminescent porous silicon films,prep ared by ultrasonic-enhanced anode electrochemical etching,display better qualiti es than the samples prepared by conventionai methods widely used at present.This ultrasonic_chemical effect roots in sonic_vacating,i.e. the generation,formatio n and rapid collapse of bubbles in the etching solution.In the process of the po rous silicon being etched,the escape rate and caving_in of hydrogen bubbles in t he pores is increased as a result of the work of the ultrasonic waves,which is h elpful to the vertical etching of the pores.
- Published
- 2005