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Brain‐inspired neuromorphic computing has drawn significant attraction as a promising technology beyond von Neumann architecture by using the parallel structure of synapses and neurons. Various artificial synapse configurations and materials have been proposed to emulate synaptic behaviors for human brain functions such as memorizing, learning, and visual processing. Especially, the memory type indium‐gallium‐zinc‐oxide (IGZO) synaptic transistor adopting a charge trapping layer (CTL) has the advantages of high stability and a low leakage current of the IGZO channel. However, the CTL material should be carefully selected and optimized to overcome the low de‐trapping efficiency, resulting from difficulty in inducing holes in the IGZO channel. In this paper, IGZO is adopted as a CTL and found out that making it degenerated is crucial to improving de‐trapping efficiency. The degenerate CTL, where electrons remain as free electrons, induces Fowler‐Nordheim tunneling by increasing the electric field across the tunneling layer. As a result, the synaptic transistor represents a high linearity of potentiation (αp: −0.03) and depression (αd: −0.47) with 64 conductance levels, which enables the spiking neural network simulation to achieve high accuracy of 98.08%. These experimental results indicate that the synapse transistor can be one of the promising candidates for neuromorphic applications. [ABSTRACT FROM AUTHOR]

Abstract Brain‐inspired neuromorphic computing has drawn significant attraction as a promising technology beyond von Neumann architecture by using the parallel structure of synapses and neurons. Various artificial synapse configurations and materials have been proposed to emulate synaptic behaviors for human brain functions such as memorizing, learning, and visual processing. Especially, the memory type indium‐gallium‐zinc‐oxide (IGZO) synaptic transistor adopting a charge trapping layer (CTL) has the advantages of high stability and a low leakage current of the IGZO channel. However, the CTL material should be carefully selected and optimized to overcome the low de‐trapping efficiency, resulting from difficulty in inducing holes in the IGZO channel. In this paper, IGZO is adopted as a CTL and found out that making it degenerated is crucial to improving de‐trapping efficiency. The degenerate CTL, where electrons remain as free electrons, induces Fowler‐Nordheim tunneling by increasing the electric field across the tunneling layer. As a result, the synaptic transistor represents a high linearity of potentiation (αp: −0.03) and depression (αd: −0.47) with 64 conductance levels, which enables the spiking neural network simulation to achieve high accuracy of 98.08%. These experimental results indicate that the synapse transistor can be one of the promising candidates for neuromorphic applications.

Atomic layer deposition (ALD) has been studied extensively to employ oxide semiconductor thin film transistor (TFT) including both active layer and gate insulator (GI). Herein, we developed an ALD sandwich structure, which deposits both semiconductor and GI by ALD. In contrast to the previous results using sputter In-Ga-Zn-O (IGZO), ALD sandwich structure IGZO TFT exhibited severe deterioration in its electrical performance when the Al2O3 was adopted for both buffer layer and GI application. Through measurement of hydrogen permeability of ALD insulators and secondary ion mass spectroscopy of each sandwich structure after annealing, we found a hydrogen accumulation effect between Al2O3 and ALD IGZO interface layer, which caused deterioration of electrical performance. In contrast, TFTs with ALD SiO2, which has proper hydrogen diffusivity, chosen as the buffer and GI had favorable electric properties of 28.17 cm2/ $\text{V}\cdot \text{s}$ , 0.20 V/dec, 0.96, and 0.12 V for the mobility, ${V}_{\text {th}}$ , subthreshold swing (SS), and hysteresis. In this regard, an optimized GI structure via the ALD SiO2 and Al2O3 in situ process based on excellent interface formation with the semiconductor and hydrogen barrier performance, respectively, was developed. This functional GI structure consisting of SiO2 and Al2O3 exhibited excellent TFT characteristics (27.52 cm2/ $\text{V}\cdot \text{s}$ , 0.24 V/dec, and 1.07 V for the mobility, SS, and ${V}_{\text {th}}$ , respectively) with improved stability even after hydrogen annealing, which was used to examine the resistance to external hydrogen, showing a threshold voltage shift of −0.15 V and a SS shift of 0.01 V/dec. [ABSTRACT FROM AUTHOR]

Solution-processed metal oxides require a great deal of thermal budget in order to achieve the desired film properties. Here, we show that the deposition temperature of sprayed zirconium oxide (ZrOx) thin film can be lowered by exposing the film surface to an ultraviolet (UV) ozone treatment at room temperature. Atomic force microscopy reveals a smooth and uniform film with the root mean square roughness reduced from ~ 0.63 nm (UVO-O) to ~ 0.28 nm (UVO-120) in the UV–ozone treated ZrOx films. X-ray photoelectron spectroscopy analysis indicates the formation of a Zr–O network on the surface film, and oxygen vacancy is reduced in the ZrOx lattice by increasing the UV–ozone treatment time. The leakage current density in Al/ZrOx/p-Si structure was reduced by three orders of magnitude by increasing the UV-ozone exposure time, while the capacitance was in the range 290–266 nF/cm2, corresponding to a relative permittivity (k) in the range 5.8–6.6 at 1 kHz. An indium gallium zinc oxide (IGZO)-based thin film transistor, employing a UV-treated ZrOx gate dielectric deposited at 200 °C, exhibits negligible hysteresis, an Ion/Ioff ratio of 104, a saturation mobility of 8.4 cm2 V−1S−1, a subthreshold slope of 0.21 V.dec−1, and a Von of 0.02 V. These results demonstrate the potentiality of low-temperature sprayed amorphous ZrOx to be applied as a dielectric in flexible and low-power-consumption oxide electronics. [ABSTRACT FROM AUTHOR]

Solution-processed metal oxides require a great deal of thermal budget in order to achieve the desired film properties. Here, we show that the deposition temperature of sprayed zirconium oxide (ZrO x ) thin film can be lowered by exposing the film surface to an ultraviolet (UV) ozone treatment at room temperature. Atomic force microscopy reveals a smooth and uniform film with the root mean square roughness reduced from ~ 0.63 nm (UVO-O) to ~ 0.28 nm (UVO-120) in the UV-ozone treated ZrO x films. X-ray photoelectron spectroscopy analysis indicates the formation of a Zr-O network on the surface film, and oxygen vacancy is reduced in the ZrO x lattice by increasing the UV-ozone treatment time. The leakage current density in Al/ZrOx/p-Si structure was reduced by three orders of magnitude by increasing the UV-ozone exposure time, while the capacitance was in the range 290-266 nF/cm 2 , corresponding to a relative permittivity (k) in the range 5.8-6.6 at 1 kHz. An indium gallium zinc oxide (IGZO)-based thin film transistor, employing a UV-treated ZrO x gate dielectric deposited at 200 °C, exhibits negligible hysteresis, an I on /I off ratio of 10 4 , a saturation mobility of 8.4 cm 2 V -1 S -1 , a subthreshold slope of 0.21 V.dec -1 , and a V on of 0.02 V. These results demonstrate the potentiality of low-temperature sprayed amorphous ZrO x to be applied as a dielectric in flexible and low-power-consumption oxide electronics., Competing Interests: The authors declare no conflict of interest.