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1. 2.1.5 Gas Sensor MEMS Platform for Harsh Conditions

Author

Alexander Mozalev, S. A. Soloviev, Nikolay Samotaev, N. P. Zaretskiy, A. A. Vasiliev, A. S. Lagutin, A. V. Sokolov, A. V. Pisliakov, and A. S. Lipilin

Subjects
Microelectromechanical systems, Materials science, business.industry, Electrical engineering, business
Published
2012
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