1. Tests With Soft X-rays of an Improved Monolithic SOI Active Pixel Sensor
- Author
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Beverly LaMarr, Atsushi Iwata, Shinya Nakashima, R. Foster, Takafumi Ohmoto, Ayaki Takeda, Gregory Y. Prigozhin, Takeshi Go Tsuru, Toshifumi Imamura, Steven E. Kissel, Syukyo G. Ryu, Yasuo Arai, and Marshall W. Bautz
- Subjects
Physics ,Nuclear and High Energy Physics ,CMOS sensor ,Pixel ,business.industry ,frontside illumination ,CMOS ,Silicon on insulator ,multi-point correlated sampling ,charge splitting ,Chip ,crosstalk ,Full width at half maximum ,Responsivity ,Imaging spectroscopy ,Optics ,Nuclear Energy and Engineering ,Active pixel sensor (APS) ,soft x-ray ,Optoelectronics ,Electrical and Electronic Engineering ,business ,silicon-on-insulator (SOI) - Abstract
We have been developing monolithic active pixel sensors with 0.2 μm Silicon-On-Insulator (SOI) CMOS technology, called SOIPIX, for high-speed wide-band X-ray imaging spectroscopy on future astronomical satellites. In this work, we investigate a revised chip (XRPIX1b) for soft X-rays used in frontside illumination. The Al Kα line at 1.5 keV is successfully detected and energy resolution of 188 eV (FWHM) is achieved from a single pixel at this energy. The responsivity is improved to 6 μV/electron and the readout noise is 18 electrons rms. Data from 3 ×3 pixels irradiated with 6.4 keV (Fe Kα) X-rays demonstrates that the circuitry crosstalk between adjacent pixels is less than 0.5%.
- Published
- 2013