1. Direct prototyping of patterned nanoporous carbon: a route from materials to on-chip devices.
- Author
-
Shen C, Wang X, Zhang W, and Kang F
- Subjects
- Electric Capacitance, Electrodes, Nanostructures ultrastructure, Nitrogen chemistry, Polymers chemistry, Porosity, Carbon chemistry, Electronics instrumentation, Nanostructures chemistry
- Abstract
Prototyping of nanoporous carbon membranes with three-dimensional microscale patterns is significant for integration of such multifunctional materials into various miniaturized systems. Incorporating nano material synthesis into microelectronics technology, we present a novel approach to direct prototyping of carbon membranes with highly nanoporous structures inside. Membranes with significant thicknesses (1 ~ 40 μm) are rapidly prototyped at wafer level by combining nano templating method with readily available microfabrication techniques, which include photolithography, high-temperature annealing and etching. In particular, the high-surface-area membranes are specified as three-dimensional electrodes for micro supercapacitors and show high performance compared to reported ones. Improvements in scalability, compatibility and cost make the general strategy promising for batch fabrication of operational on-chip devices or full integration of three-dimensional nanoporous membranes with existing micro systems.
- Published
- 2013
- Full Text
- View/download PDF