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This paper develops a new combined technology to fabricate complex 3D microstructure based on micro milling and micro sinking electro-discharge machining (micro-SEDM). Graphite microform electrode is in-situ prepared by micro milling and subsequently used for micro-SEDM, integrating the advantages of two processes. Material removal rate (MRR) and electrode wear ratio (EWR) are experimentally investigated to determine proper parameters for different micro-SEDM performances. Three different machining strategies including single, double and treble micro-SEDM are adopted to fabricate 3D microstructure. The surface roughness, size accuracy, machining duration and cost of micro-cavities, and electrode wear under different strategies have been compared. The results show that treble micro-SEDM produces superior surface quality with 0.83 μm Ra and size accuracy with ≤ 28.05 μm tolerance. The proposed method broadens the machining flexibility and capability of micro-fabrication techniques. [ABSTRACT FROM AUTHOR]

This paper presents a hybrid process combine micro reciprocated wire-EDM which uses reciprocated travelling wire with 50 μm diameter as tool electrode, with the precision forging, achieving the economical and high-efficiency sustainable production of micro gears. A micro gear mold with 0.1 mm module and 10 tooth number is devised, and the 14.5 μm mold fit clearance is determined by analyzing the established mold matching model and conducting the numerical simulation of precision forging. During the micro reciprocated wire-EDM of micro gear mold from SKD11, the basic experiments are performed to study the effect of the main parameters on machining accuracy and productivity, and whilst the proper machining parameters are obtained. The micro gear punch and die are successfully fabricated by micro reciprocated wire-EDM, showing good surface quality with 0.90 μm and 0.83 μm Ra respectively, and low dimensional deviations of ≤1.3 μm and 2.1 μm respectively. Finally, the precision forging of the micro gears are conducted on ultrafine grained (UFG) high purity copper by the machined micro gear mold. The forged micro gears have high forming precision with ≤4.1 μm deviation from the micro gear mold and smooth surface with 0.86 μm copied from the micro gear die cavity, verifying the feasibility of the proposed method for the sustainable production of micro gears. [ABSTRACT FROM AUTHOR]