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With three-dimensional (3D) microelectrodes used to machine microcavities in microelectrical discharge machining (micro-EDM), the processing efficiency can be greatly improved. However, the surfaces of a laminated 3D microelectrode always have stair steps, which will be further copied to the machined surfaces of the microcavities, reducing the processed surface quality. To solve the problems, the paper proposed using layer-by-layer scanning microelectrochemical machining (micro-ECM) to eliminate the stair-stepping effect of the laminated 3D microelectrodes. First, wire electrical discharge machining (WEDM) was chosen to cut Cu foils for obtaining multilayer two-dimensional (2D) microstructures. Second, the multilayer 2D microstructures were applied to thermal diffusion bonding to form 3D microelectrode blanks. Then, the 3D microelectrode blanks were processed via layer-by-layer scanning micro-ECM to eliminate the stair steps on the surfaces. The influences of applied voltage, offset distance, and layer thickness on the elimination of the stair-stepping effect were investigated in details. Experimental results show that the stair steps on the laminated 3D microelectrode surfaces were eliminated obviously under 4.0 V applied voltage, 200 μm offset distance, and 20 μm layer thickness. Finally, the laminated 3D microelectrodes without stair steps on the surfaces were applied to micro-EDM to process microcavities. Two typical microcavities without the stair steps were obtained. [ABSTRACT FROM AUTHOR]

Tool electrode wear varying with different materials in electrical discharge machining (EDM) is unavoidable, thus inevitably reducing the machining quality and accuracy of microstructures. To convert this disadvantageous phenomenon into a beneficial process, the paper proposed a wear-variation EDM (WV-EDM) approach to fabricate a laminated disc electrode (LDE) with stable-shape micro channels on the outer edge surface; this electrode was subsequently used to machine micro grooves on workpieces by EDM. The WV-EDM formation of the LDE, the relationship between relative volume wear rate of the disc foils and the machining depth, and flow field distribution in the machining gap of the LDE during processing were investigated. The results show that the method proposed herein could reliably produce LDEs with stable micro channels on the outer edge surfaces that could subsequently be employed to continuously machine micro groove arrays with the same machining depth on the same material workpiece by EDM, and especially LDE reshaping was unnecessary. Additionally, the "pump effect" of the vortex, located in the flow field between micro channels on the LDE and workpiece, was beneficial for debris removal. Using the proposed method, micro groove arrays and columnar microstructures were successfully fabricated on Ti–6Al–4V alloy workpieces. [ABSTRACT FROM AUTHOR]