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1. Editorial Special Section on the 2011 International Conference on Microelectronic Test Structures.

Author

Selmi, Luca

Subjects
MICROELECTRONICS conferences, COMPLEMENTARY metal oxide semiconductors, DOPING agents (Chemistry), SEMICONDUCTOR devices
Abstract

The six papers in this special section are extended papers from the 2011 International Conference on Microelectronic Test Structures, held in Amsterdam, The Netherlands. The papers cover new advances in variation and stress characterization for complementary metal-oxide-semiconductor technology, improved parameter extraction techniques, and new test structures for process, doping, and temperature characterization. [ABSTRACT FROM AUTHOR]

Published
2012
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