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The ZrB2-SiC-graphite composite is one of the most promising ceramics, which show significant potential in manufacturing parts served in ultra-high temperature. Micro-electrical discharge machining (micro-EDM) is an effective method in machining this conductive hard ceramic. However, the recast layer characterized by craters and micro-cracks is formed on the machined surface, resulting in poor surface quality. In this paper, micro-EDM and micro-ultrasonic machining (micro-USM) combined milling is proposed for manufacturing 3D micro-cavities in the ZrB2-SiC-graphite composite. The micro-cavity is firstly machined by micro-EDM milling, followed by micro-USM finish milling to remove the recast layer in the same system without changing the micro-tool. The machining performances are investigated with consideration of the surface topography and finishing depth. It is found that the more recast layer is removed when a higher ultrasonic amplitude, larger abrasive grain size, and lower tool feedrate are employed. Based on the preliminary experiments, the proper machining parameters are obtained and applied to the fabrication of micro-cavities. The machining results show that the surface quality is improved with the low surface roughness and absence of defect layer. Meanwhile, the high machining accuracy in the depth direction and processing efficiency are achieved. It is verified that the micro-EDM and micro-USM combined milling process is feasible for fabricating 3D micro-cavities in the ZrB2-SiC-graphite composite. [ABSTRACT FROM AUTHOR]

The ZrB-SiC-graphite composite is a promising engineering material for ultra-high temperature applications. However, the fabrication of micro-hole in this ceramic composite is difficult due to the high hardness. This paper presents micro-electrical discharge machining (EDM) drilling of the ZrB-SiC-graphite composite using the micro sheet-cylinder tool electrode to improve the machining efficiency and quality of micro-hole. The micro-hole is firstly drilled by the sheet segment of electrode under the high capacitance, and then finish drilling is conducted using the cylinder segment of electrode under the low capacitance. The material removal rate, surface roughness, surface microcracks, debris, and material removal mechanisms are investigated. It is found that the material is removed by melting/evaporation and thermal spalling during micro-EDM of the ZrB-SiC-graphite composite, and the thermal spalling effect produces the large size irregular debris. The electrode with the sheet shape can significantly increase the machining efficiency compared with the electrode with the cylinder shape. Furthermore, the surface roughness is reduced in finish drilling with the low capacitance. The experiment results of micro-holes machined by the sheet-cylinder electrode demonstrate that the presented method can improve the machining efficiency, surface quality, and machining accuracy. [ABSTRACT FROM AUTHOR]