1. GaP-interlayer formation on epitaxial GaAs(100) surfaces in MOVPE ambient
- Author
-
Leander Tapfer, Kerstin Volz, Henning Döscher, Andreas Beyer, Wolfgang Stolz, P. Hens, and Tapfer, L.
- Subjects
A1. High resolution X-ray diffraction ,Diffraction ,Materials science ,B2. Semiconducting III-V materials ,A1. Growth model ,A1. Interfaces ,Nanotechnology ,02 engineering and technology ,Epitaxy ,01 natural sciences ,Gallium arsenide ,Inorganic Chemistry ,chemistry.chemical_compound ,B2. Semiconducting gallium compounds ,0103 physical sciences ,Monolayer ,Scanning transmission electron microscopy ,Materials Chemistry ,Metalorganic vapour phase epitaxy ,Anisotropy ,Electronic band structure ,A1. Interface ,010302 applied physics ,business.industry ,A3. Metalorganic vapor phase epitaxy ,A1. Growth models ,B2. Semiconducting gallium compound ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,chemistry ,Optoelectronics ,0210 nano-technology ,business - Abstract
The challenge to embed a single monolayer of phosphorus during epitaxial gallium arsenide (GaAs) growth triggers numerous questions regarding practical preparation, effective analysis, and fundamental consideration of the resulting interlayers. Beyond better understanding of III-V heterointerface formation processes, precise interlayer incorporation may enable enhanced interface design, effective diffusion barriers, and advanced band structure engineering. We employ metalorganic vapor phase epitaxy (MOVPE) in various growth modes (continuous, with interruptions, pulsed, surface exchange) targeting the most abrupt incorporation of thinnest GaP films in the GaAs(100) matrix. The intensities of higher order interference fringes in high resolution X-ray diffraction (HR-XRD) serve as a measure of the effective GaPxAs1−x film thickness and P concentration, which is compared to compositional analysis based on scanning transmission electron microscopy (STEM). In situ reflection anisotropy spectroscopy (RAS) provided us with insights to the GaAs(100) surface configurations relevant during the P interlayer preparation. © 2016 Elsevier B.V.
- Published
- 2017
- Full Text
- View/download PDF