Author: "Kang, Fu-H." / Search Limiters: Full Text - Searchworks@Jio Institute Digital Library Search Results

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1. Photochemistry of photoresists and underlayer materials upon irradiation at 13.5 nm

Author: Ho, Grace H., Shih, Yu-H., Kang, Fu-H., Hung, Jia-C., Shao, Chih-H., and Lai, Yu-H.
Published: 2010
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2. Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5 nm

Author: Ho, Grace H., primary, Shao, Chih-H., additional, Sung, Jia-J., additional, Kang, Fu-H., additional, Kao, Chih-B., additional, Hung, Wei-L., additional, Chou, Yu-L., additional, and Huang, Yen-H., additional
Published: 2012
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