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Extensive and systematic time-resolved measurements of the electron density in an ArF laser discharge were performed using an accurate two-wavelength laser interferometry. The electron density dependences and laser output power on the Ar and F2 fractions in Ar-F2-He mixture and on the Ne-He mixing ratio in Ar-F2-He-Ne mixture were examined. A comparison of experimental results with computer simulation results was conducted.

The first measurements of time-resolved number densities of the fluorine negative (F-) ion in a discharge-pumped ArF excimer laser are conducted using a dye laser absorption method. The time-dependent F- ion density in an ArF laser plasma as well as the dependences of the F- ion densities, laser output power, electron energy and photon absorption due to F- on the F2 fractional concentration in F2-Ar-He gas mixture are examined. Based on the results, the roles of F- and F2 in the ArF excitation mechanisms are discussed.