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2. Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization

Author

Li, Katherine Shu-Min, primary, Chen, Leon Li-Yang, additional, Liao, Peter Yi-Yu, additional, Wang, Sying-Jyan, additional, Huang, Andrew Yi-Ann, additional, Chou, Leon, additional, Tsai, Nova Cheng-Yeh, additional, Cheng, Ken Chau-Cheung, additional, Han, Gus Chang-Hung, additional, Lee, Chen-Shiun, additional, Chen, Jwu E., additional, Liang, Hsing-Chung, additional, and Hsu, Chung-Lung, additional

Published
2022
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3. Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement

Author

Li, Katherine Shu-Min, primary, Liao, Peter Yi-Yu, additional, Cheng, Ken Chau-Cheung, additional, Chen, Leon Li-Yang, additional, Wang, Sying-Jyan, additional, Huang, Andrew Yi-Ann, additional, Chou, Leon, additional, Han, Gus Chang-Hung, additional, Chen, Jwu E., additional, Liang, Hsin-Chung, additional, and Hsu, Chung-Lung, additional

Published
2021
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