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Abstract The technique of plasma processing is beneficial for wafer cleaning and precision etching of integrated circuits and essential in manufacture of advanced semiconductor devices with unmatched perfection. Research on two‐dimensional (2D) materials, such as transition metal dichalcogenides(TMDs), offers a promising solution to the challenges in semiconductor miniaturization. TMDs, with their atomic layer thicknesses and silicon‐like bandgaps, can be integrated using existing plasma systems. Different 2D crystal structures, such as 1T and 2H configurations, exhibit distinctive properties. Computational approaches are also developed to provide guidelines for controlled synthesis and etching of large‐scale and high‐quality 2D materials. Plasma/gas‐surface interactions during the synthesis, etching, and phase transformation of 2D materials are explored using atomistic simulations such as density functional theory and molecular dynamics. The reaction energetics, chemical species, and associated kinetics are discovered in the simulation study. These results decipher various mechanisms of 2D materials processing at the microscopic scale and predict certain optimal process parameters. Plasma/gas‐based semiconductor technologies are crucial in electronics because they enable production of advanced semiconductors. Plasma/gas etching allows precise and selective removal of material and plasma‐enhanced chemical vapor deposition enhances chemical reactions for efficient film deposition; therefore, these processes are majorly important for harnessing 2D materials in electronic applications.

In the era of big data, negative differential resistance (NDR) devices have attracted significant attention as a means of handling massive amounts of information. While 2D materials have been used to achieve NDR behavior, their intrinsic material characteristics have produced limited performance improvements. In this article, a facile phase modification method is presented via a plasma‐assisted sulfidation process to synthesize multiphased WS2 thin films, including distorted 1 T (D‐1 T) phase and 2 H phases for photoreactive NDR devices with p‐Si. The D‐1 T phase offers a feasible route to achieve high‐performance NDR devices with excellent stability and semimetallic properties. A comprehensive investigation of experimental and computational analyses elucidates the phase transition mechanism with various temperatures and electrical properties of D‐1 T WS2. In addition, optimizing electron tunneling in the multiple‐phased tungsten disulfide (MP‐WS2)/p‐Si heterojunction at MP‐WS2 with 77.4% D‐1 T phase results in superior NDR performance with a peak‐to‐valley current ratio of 13.8 and reliable photoreactive random‐access memory. This unique phase engineering process via plasma‐assisted sulfidation provides a pioneering perspective in functionalization and reliability for next‐generation nanoelectronics.

In the past decades, toxic gas emissions have increased significantly owing to the rapid growth of industry and road transportation. Therefore, monitoring major pollutants, such as NO2, is crucial to protecting human health. The 2D materials that contain numerous adsorption sites and exhibit ultrahigh chemical reactivity can be used as sensor materials to detect these toxic gases. Herein, highly uniform, large‐area carbon‐incorporating hierarchical MoS2 nanobranches are synthesized by metal–organic chemical vapor deposition (MOCVD). An in situ carbon‐incorporation method that uses the carbon impurity present in the precursor as the seed during the MOCVD process is employed to form a hierarchical structure containing abundant adsorption sites. A gas sensor based on the resulting C‐MoS2 nanobranches contains many edge sites exhibits high adsorption energy, and consequently, has high NO2 gas sensitivity. Hence, this hierarchical C‐MoS2 gas sensor shows excellent sensing properties, exhibiting a device response of 1.67 at an extremely low NO2 concentration (≈5 ppb). The limit of detection of the gas sensor for NO2 is calculated to be low (≈1.58 ppt), further confirming its exceptional performance. Thus, the hierarchical C‐MoS2 nanobranches deposited herein provide novel insights regarding the properties of 2D materials and are highly suited for fabricating high‐performance NO2 sensors.

To address the challenges in real-time process diagnosis within the semiconductor manufacturing industry, this paper presents a novel machine learning approach for analyzing the time-varying 10th harmonics during the deposition of low-k oxide (SiOF) on a 600 Å undoped silicate glass thin liner using a high-density plasma chemical vapor deposition system. The 10th harmonics, which are high-frequency components 10 times the fundamental frequency, are generated in the plasma sheath because of their nonlinear nature. An artificial neural network with a three-hidden-layer architecture was applied and optimized using k-fold cross-validation to analyze the harmonics generated in the plasma sheath during the deposition process. The model exhibited a binary cross-entropy loss of 0.1277 and achieved an accuracy of 0.9461. This approach enables the accurate prediction of process performance, resulting in significant cost reduction and enhancement of semiconductor manufacturing processes. This model has the potential to improve defect control and yield, thereby benefiting the semiconductor industry. Despite the limitations imposed by the limited dataset, the model demonstrated promising results, and further performance improvements are anticipated with the inclusion of additional data in future studies.

Abstract Diarylethene is one of the photo-responsive materials that show rapid and reversible changes in their color/electrochemical properties and macroscopic deformations in the crystalline phase by light irradiation. Photoisomerization is the main cause of the photo reactivity of diarylethene, and we established a statistical model based on the density matrix formalism, which predicts quantitative isomerization progress as a population term. The model reflects photo-switching properties of the target molecule, which were characterized by first principle calculations, and external stimulus factors (light irradiation conditions and temperature). By merging light penetration physics with the model, we derived light penetration depth dependent isomerization progress to theoretically investigate photodeformation of single crystal. The model well reproduced in-plane shear deformation under ultraviolet light irradiation which would provide guideline for photoactuator design. In addition, the statistical model addressed crucial findings (primary stimuli and molecular design parameter for increasing the isomerization rate, external stimuli enhancing fluorescence performance) itself.

Background: The need for a storage method capable of preserving the intrinsic properties of bones without using toxic substances has always been raised. Supercooling is a relatively recently introduced preservation method that meets this need. Supercooling refers to the phenomenon of liquid in which the temperature drops below its freezing point without solidifying or crystallizing. Objectives: The purpose of this study was to identify the preservation efficiency and applicability of the supercooling technique as a cortical bone allograft storage modality. Methods: The biomechanical effects of various storage methods, including deep freezing, cryopreservation, lyophilization, glycerol preservation, and supercooling, were evaluated with the three-point banding test, axial compression test, and electron microscopy. Additionally, cortical bone allografts were applied to the radial bone defect in New Zealand White rabbits to determine the biological effects. The degree of bone union was assessed with postoperative clinical signs, radiography, micro-computed tomography, and biomechanical analysis. Results: The biomechanical properties of cortical bone grafts preserved using glycerol and supercooling method were found to be comparable to those of normal bone while also significantly stronger than deep-frozen, cryopreserved, and lyophilized bone grafts. Preclinical research performed in rabbit radial defect models revealed that supercooled and glycerolpreserved bone allografts exhibited significantly better bone union than other groups. Conclusions: Considering the biomechanical and biological superiority, the supercooling technique could be one of the optimal preservation methods for cortical bone allografts. This study will form the basis for a novel application of supercooling as a bone material preservation technique. [ABSTRACT FROM AUTHOR]