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We detail the use of ring oscillators (ROs) for yield learning during the research phase of a CMOS technology generation. Failing circuits are located and classified based on electrical analysis of ROs and FETs (Field Effect Transistor) wired out from RO environments. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.

This study investigates and demonstrates the enhancement in thermoelectric power factor for n-type AlZnO/InAlZnO multilayer quantum wells as compared to their counterpart bulk films. A 10–20% improvement is observed for operating temperatures

This study investigates the thermoelectric (TE) power factor for radiofrequency (RF)-sputtered n-type ZnO:Al/ZnO:(Al,In) multilayer quantum wells (QW) and the dependence on band-gap offset at high operating temperatures. The structures are 50 periods of 10-nm-thick barrier and well layers. The TE power factors for all films are promising (>20 × 10−4 W/m2 K); however, a decline in electronic transport is evident for each of the doped wells over a specific range of operating temperatures. This supports the need for optimum doping levels for a specific operating temperature range; e.g., 2 at.%, 5 at.%, and 8 at.% indium are optimum at 300 K to 600 K, 600 K to 725 K, and >725 K, respectively. A model has also been developed to calculate the QW electronic transport as a function of temperature and band-gap offset, which is subsequently related to doping concentration. This model confirms a loss in electrical conductivity due to charge carriers gaining enough kinetic energy to overcome the QW barrier, which results in multilayer hopping across well–barrier interfaces. In addition, film microstructure and interface roughness have been determined by x-ray and spectroscopy techniques.

An improvement in the thermoelectric power factor of Al doped ZnO has been achieved by means of co-doping with indium using a dual magnetron sputtering system. The concentration of indium in the film was varied from 0 to 10 atomic % by varying the RF power of the In target, with the ZnO:Al target fixed at 100 W. It has been found that the films with In concentrations at or below 5 at.% have no significant change in microstructure, and yet a marked improvement in thermopower. At higher doping levels, the Seebeck coefficient continues to increase, however poly-crystallinity is induced in the ZnO matrix which results in a considerable decrease in electrical conductivity. This factor ultimately has a negative impact on the materials power factor. Taking into account the films studied, (ZnO)Al.03In.02 exhibited the best thermoelectric properties with an electrical conductivity of 5.88 × 102 S/cm and a Seebeck coefficient of −220 μV/K at 975 K, resulting in a power factor is 22.1 × 10−4 Wm−1 K−2, which is three times greater than for the film with no In doping. Film microstructure, composition, and thermal stability were investigated using X-ray diffraction, scanning electron microscopy, and Auger electron spectroscopy.