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This paper reports a method to suppress the in-phase error of silicon micro gyroscopes in real time, which can realize long-term stability, without significantly affecting the sensor noise. The in-phase error suppression is by periodically changing the polarity of the drive mode, and the bias (zero rate output) decreases from -7.8deg/s to -3.9deg/s, attenuation amplitude of which is about 3.9deg/s. By sampling the output using information fusion technology, low shirt-time noise and bias instability can be obtained without cutting off the gyroscope and adding additional sensors, the bias instability of which is reduce from 35.0 deg/hr to 10.8 deg/hr. The feasibility of the approach was experimentally evaluated using a MEMS gyroscope with the algorithm implementation on FPGA in real-time.

This paper describes a compact and low-power oscillating circuit for silicon oscillating accelerometer (SOA). The influence of oscillation amplitude control strategy on accelerometer performance is analyzed. A rail to rail comparator replaces the traditional AGC (automatic gain control) circuit for oscillation amplitude control. It makes the circuit more compact, lower power consumption, and reduces the flicker noise introduced by amplitude control greatly. The experiment shows the bias stability is 13.3µg from 22.9µg, the bias-instability is 4.3µg from 9.3µg, and the system power consumption is reduced to 200mW from 1.2W.

This article presents a self-temperature compensation method used for MEMS gyroscopes. Drive frequency of gyroscope is employed as temperature compensation source, so that no external temperature sensor needed. When gyroscope starts to work, the circuit generates heat, providing the temperature input. Meanwhile, only 120 seconds is needed to calculate compensation parameters without pre-calibration. Therefore, the efficiency of experiment and study can be improved by this method.