1. Nanofabricated solid immersion lenses registered to single emitters in diamond.
- Author
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Marseglia, L., Hadden, J. P., Stanley-Clarke, A. C., Harrison, J. P., Patton, B., Ho, Y.-L. D., Naydenov, B., Jelezko, F., Meijer, J., Dolan, P. R., Smith, J. M., Rarity, J. G., and O'Brien, J. L.
- Subjects
MICROFABRICATION ,LENSES ,LIGHT sources ,DIAMONDS ,NANOSTRUCTURED materials ,FLUORESCENCE microscopy ,FOCUSED ion beams ,PLASMA etching - Abstract
We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere. [ABSTRACT FROM AUTHOR]
- Published
- 2011
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