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Abstract Sputtering of Ar atoms from the surface of nominally pure and O2 doped solid Ar, preliminary irradiated by an electron beam, is studied using a combination of activation spectroscopy methods — thermally stimulated luminescence (TSL) and thermally stimulated exoelectron emission (TSEE) — with measurements of the sputtering yields. Anomalous yield of Ar atoms was detected at temperatures much lower than the characteristic sublimation temperature of solid Ar. A charge recombination reaction is considered to be the stimulating factor for the low temperature desorption from preirradiated solid Ar. Possible models of the anomalous sputtering are discussed and the crowdion mechanism of the atom ejection from the surface is proposed. The influence of oxygen on the sputtering yield is considered. [ABSTRACT FROM AUTHOR]