Angelo Giglia, José A. Aznárez, Stefano Nannarone, Daniele Bajoni, José A. Méndez, Luis Rodríguez-de Marcos, Sergio García-Cortés, Nicola Mahne, Manuela Vidal-Dasilva, A. Marco Malvezzi, Juan I. Larruquert, Fabio Frassetto, Luca Poletto, European Commission, Ministerio de Ciencia y Tecnología (España), and Consejo Superior de Investigaciones Científicas (España)
8 págs.; 8 figs.; OCIS codes: (260.7200) Ultraviolet, extreme; (120.4530) Optical constants; (350.2450) Filters, absorption; (230.4170) Multilayers; (310.6860) Thin films, optical properties., © 2015 Optical Society of America. The low expected absorption of Ca in the extreme ultraviolet (EUV) makes it an attractive material for multilayers and filters because most materials in nature strongly absorb the EUV. Few optical constant data had been reported for Ca. In this research, Ca films of various thicknesses were deposited on gridsupported C films and their transmittance measured in situ from the visible to the soft x-rays. The measurement range contains M2,3 and L2,3 absorption edges. Transmittance measurements were used to obtain the Ca extinction coefficient k. A minimum k of 0.017 was obtained at ∼23 eV, which makes Ca a promising low-absorption material for EUV coatings. A second spectral range of interest for its low absorption is below the Ca L3 edge at ∼343 eV. Measured k data and extrapolations were used to calculate the refractive index n using Kramers.Kronig relations. This is the first self-consistent data set on Ca covering a wide spectral range including the EUV., We acknowledge support by the European Community—Research Infrastructure Action under the FP6 “Structuring the European Research Area” Programme (through the Integrated Infrastructure Initiative “Integrating Activity on Synchrotron and Free Electron Laser Science”) through proposal number Ref. 2007655. This work was also supported by the National Programme for Space Research, Subdirección General de Proyectos de Investigación, Ministerio de Ciencia y Tecnología, project numbers AYA2010-22032 and AYA2013-42590-P. L. Rodrí- guez-de Marcos and S. García-Cortés are thankful to Consejo Superior de Investigaciones Científicas (CSIC) for funding under the Programa JAE, partially supported by the European Social Fund. M. Vidal-Dasilva acknowledges financial support from an FPI fellowship number BES-2006-14047