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Highlights: [•] We developed a scanning Hall probe microscope equipped with a GaAs film sensor. [•] We observe the magnetic flux density at the steel from several lift-off distance. [•] The reduction of lift-off distance is effective to observe the magnetic fields. [•] It is possible to observe the magnetization caused by plastic deformation. [Copyright &y& Elsevier]

Abstract: We present the design, fabrication and experimental characterization of a new micromachined electromagnetic probe, which can be readily adapted to various biological manipulation and stimulation applications. The micro electromagnetic probe consists of a protruding (out-of-chip), sharp Permalloy needle embedded into a three-dimensional gold conducting coil. The probe fabrication is carried out using traditional surface micromachining processes coupled with assembly techniques. This hybrid approach significantly reduces fabrication difficulties and provides a simple and straightforward technique to realize integrated core-coil geometries. Furthermore, by using a scanning Hall probe microscope (SHPM), a comprehensive, high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time. The manipulation of sub-micron sized magnetic particles with the developed micro electromagnetic probe is also demonstrated. [Copyright &y& Elsevier]

We have developed a scanning Hall probe microscope (SHPM) system utilizing closed-cycle cryocooler. The Hall probe used in this system is fabricated from a GaAs/GaAlAs two-dimensional electron gas. A stepping-motor-driven XYZ translator is used with a resolution better than 0.1 μm and maximum scan range of 20 × 20 mm2. The spatial resolution of the system is about 5 μm and magnetic resolution is about 100 mG. By using this system, we have successfully resolved the quantized vortices on the cleaved surface of Bi2Sr2CaCu2O8+y single crystal. [Copyright &y& Elsevier]