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Scanning spreading resistance microscopy (SSRM) measurements were performed on GaAs thick films grown by hydride vapor phase epitaxy technology under different growth conditions to evaluate their carrier concentrations. For this purpose, a calibration curve was established based on a multilayer staircase structure grown by molecular beam epitaxy. The dopant calibration range measured by secondary ion mass spectrometry is from 5 × 1016 to 1019 cm−3. An abnormal phenomenon in the calibration process was explained by taking into account the parasitic parallel resistance of the calibration samples. Finally, the calibration curve was used to quantitatively analyze the carriers inside the Zn doping p-type GaAs film from 4 × 1016 to 1018 cm−3 range. We demonstrate here the applicability of SSRM to the in-depth analysis of thick epilayers, providing new inputs for the control of thick film technologies. [ABSTRACT FROM AUTHOR]

Nanowires (NWs) are promising for the integration of III–V compound-based electrical and optical devices on Si. Selective area growth (SAG) of InxGa1–xAs NWs with compositions x varying from 0.34 to 0.90 is achieved. NWs are grown on patterned Si(111) substrates by hydride vapor phase epitaxy (HVPE) at temperatures around 690 °C. The composition is measured using EDX profiles along their lengths and found to be quite homogeneous. Theoretical analysis revealed that the NW composition is kinetically controlled and well-fit by the one-parametric Langmuir–McLean formula, with no thermodynamic factors influencing the compositional trend. This study highlights the capability of catalyst-free HVPE SAG to grow highly uniform InGaAs NW arrays with a widely tunable composition on Si substrates. [ABSTRACT FROM AUTHOR]

We demonstrate the selective area growth of InGaAs nanowires (NWs) on GaAs (111)B substrates using hydride vapor phase epitaxy (HVPE). A high growth rate of more than 50 μ m h−1 and high aspect ratio NWs were obtained. Composition along the NWs was investigated by energy dispersive x-ray spectroscopy giving an average indium composition of 84%. This is consistent with the composition of 78% estimated from the photoluminescence spectrum of the NWs. Crystal structure analysis of the NWs by transmission electron microscopy indicated random stacking faults related to zinc-blende/wurtzite polytypism. This work demonstrates the ability of HVPE for growing high aspect ratio InGaAs NW arrays. [ABSTRACT FROM AUTHOR]

High aspect ratio, rod-like and single crystal phase GaAs nanowires (NWs) were grown by gold catalyst-assisted hydride vapor phase epitaxy (HVPE). High resolution transmission electron microscopy and micro-Raman spectroscopy revealed polytypism-free zinc blende (ZB) NWs over lengths of several tens of micrometers for a mean diameter of 50 nm. Micro-photoluminescence studies of individual NWs showed linewidths smaller than those reported elsewhere which is consistent with the crystalline quality of the NWs. HVPE makes use of chloride growth precursors GaCl of which high decomposition frequency after adsorption onto the liquid droplet catalysts, favors a direct and rapid introduction of the Ga atoms from the vapor phase into the droplets. High influxes of Ga and As species then yield high axial growth rate of more than 100 μm/h. The diffusion of the Ga atoms in the liquid droplet towards the interface between the liquid and the solid nanowire was investigated by using density functional theory calculations. The diffusion coefficient of Ga atoms was estimated to be 3 × 10-9 m2/s. The fast diffusion of Ga in the droplet favors nucleation at the liquid-solid line interface at the center of the NW. This is further evidence, provided by an alternative epitaxial method with respect to metal-organic vapor phase epitaxy and molecular beam epitaxy, of the current assumption which states that this type of nucleation should always lead to the formation of the ZB cubic phase. [ABSTRACT FROM AUTHOR]

Well-ordered and vertically aligned InN nanorods with high aspect ratios are synthesized by hydride vapor phase epitaxy (HVPE) using the selective area growth (SAG) approach. The growth occurs through the apertures of a SiNx masked Ga-polar GaN/c-Al2O3 template for adjusted growth temperature and V/III ratio. The nanorods exhibit a hexagonal shape without any rotation around the growth axis. The wurtzite structure and the high crystalline quality of InN nanorods are confirmed by X-ray diffraction (XRD) as well as by high-resolution transmission electron microscopy (HR-TEM). Only few stacking faults are identified at the bottom part of the nanorods. Photoluminescence (PL) displays an emission peak centered at 0.77 eV which agrees with the band gap of InN. These promising achievements, which go far beyond the existing InN growth limitations, pave the way towards the integration of pure InN in future devices. [ABSTRACT FROM AUTHOR]

The growth of GaN 3-D microstructures is investigated by SAG-HVPE. Capitalizing on the properties of this kinetically-controlled process, the main experimental parameters and physical mechanisms that control the shaping of 3D GaN prisms and pyramids in SAG-HVPE are highlighted. Growth experiments performed on N-polar AlN/Si(100) and Ga-polar GaN/Si(111) substrates also provide insight into how to switch from a pyramid to a prismatic shape for a given substrate polarity. The aspect ratio of GaN rods could be tuned by playing with the HCl partial pressure additionally introduced during growth. The influence of both mass transport and surface kinetics is discussed, as the crystal growth rate varies with increasing surface area as time goes by. Ammonia treatment prior to the growth, aimed at blocking the r planes thanks to H2 passivation, is proposed to tune the morphology of the GaN rods. Raman spectroscopy performed on individual GaN rods shows no relevant strain field and no structural differences between the rods and state-of-the-art bulk GaN. [ABSTRACT FROM AUTHOR]

The growth of GaN by HVPE has been analysed by means of a thermodynamical and kinetic study. Two mechanisms involved in the growth of (00.1) GaN HVPE have been deduced from the numerous experiments performed on (0 0 1) GaAs by the chloride method. The parameters of these two growth mechanisms have been resolved from the experimental variations of HVPE GaN growth rate. Experiments performed in conditions of expected fast etching by HCl, in a mixed H2/N2 carrier gas, led to a new growth mechanism by considering a combined Cl desorption by GaCl as GaCl2 and an etching by HCl. The apparent activation energy of the new Cl desorption reaction is the only new parameter introduced in the third growth mechanism. In this paper, we present the results obtained for the determination of a more accurate value of this new parameter. The growth rate was measured versus the growth temperature for different H2 concentrations in the carrier gas. A quite good agreement was obtained between experimental and theoretical values. [Copyright &y& Elsevier]