1. A device library for the ultra-low loss Si3N4 platform
- Author
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Quentin Wilmart, Sylvain Guerber, Jonathan Faugier-Tovar, Yasmine Ibrahimi, Camille Petit-Etienne, Laurene Youssef, Carole Socquet-Clerc, André Myko, Karen Ribaud, François Duport, Erwine Pargon, Frédéric Van Dijk, Laboratoire des technologies de la microélectronique (LTM ), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)
- Subjects
Grating Coupler ,[SPI]Engineering Sciences [physics] ,Photonics ,Resonator ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Physics::Optics ,Waveguide ,Si3N4 - Abstract
International audience; Silicon nitride platforms based on ultra-low loss tightly confining waveguides present a great interest for a wide range of applications. We present our 200mm platform based on 800nm-thick LPCVD Si3N4 with optical losses below 5dB/m. It is completed with a set of photonic components specially developed for this platform: grating and edge fiber couplers, directional couplers, MMI, Y-junction, racetrack resonators and an AWG multiplexer. The Si3N4 platform and its device library are the basic building blocks for more complex circuits targeting advanced applications: LiDAR, microwave optics, quantum photonics, neuromorphic computing and sensors.
- Published
- 2022
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