1. A MEMS Convective Accelerometer Equipped with On-Chip Facilities for Sensitivity Electrical Calibration
- Author
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Norbert Dumas, Florence Azaïs, Ahmed Amine Rekik, Frédérick Mailly, Pascal Nouet, Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), Département de Génie Électrique de Sfax [ENIS] (CEM Lab - ENIS), École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax (ENIS), Conception et Test de Systèmes MICroélectroniques (SysMIC), and Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)
- Subjects
Microelectromechanical systems ,Engineering ,business.industry ,Process (computing) ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Accelerometer ,020202 computer hardware & architecture ,Power (physics) ,Generator (circuit theory) ,0202 electrical engineering, electronic engineering, information engineering ,Electronic engineering ,Calibration ,Sensitivity (control systems) ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,0210 nano-technology ,business ,Electrical impedance - Abstract
International audience; In this paper, we propose an alternate electrical-only strategy to perform both test and calibration of MEMS convective accelerometers' sensitivity. The idea is calibrate device sensitivity through the adjustment of the power dissipated in the heater element. For this, the system is equipped with an on-chip programmable digital pulse modulated generator and an iterative search procedure based on simple impedance measurements is implemented. The method is evaluated through Monte-Carlo simulations considering typical process variations and results are presented to demonstrate the potentialities of the technique.
- Published
- 2012