1. Computer-generated moiré profilometry based on fringe-superposition
- Author
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Hongmei Li, Cai Xu, Hechen Zhang, Chengmeng Li, Yiping Cao, Lu Wang, and Yingying Wan
- Subjects
Accuracy and precision ,Multidisciplinary ,lcsh:R ,Phase (waves) ,lcsh:Medicine ,02 engineering and technology ,Moiré pattern ,021001 nanoscience & nanotechnology ,01 natural sciences ,Article ,010309 optics ,Superposition principle ,Optical physics ,0103 physical sciences ,Trigonometric functions ,Inverse trigonometric functions ,lcsh:Q ,Profilometer ,Optical techniques ,0210 nano-technology ,lcsh:Science ,Algorithm ,Mathematics ,DC bias - Abstract
A computer-generated moiré profilometry based on algebraic addition instead of algebraic multiplication is proposed. Firstly, the two AC components of the captured fringe patterns on the reference plane with \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\pi /2$$\end{document}π/2 phase difference are retrieved and saved in advance. While measuring, two sinusoidal gratings with \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\pi$$\end{document}π phase difference are projected onto the measured object alternatively, and the corresponding deformed patterns are captured. Then the AC component of the captured deformed pattern can be separated exactly. When the positive and negative AC component of the captured deformed pattern are added to the two prestored AC components respectively, two moiré fringes only reflect sine and cosine of the object’s phase information can be successfully generated via a series of data processing procedures. Finally, the phase distribution of the measured object can be extracted by arctangent of the ratio of these two moiré fringes. Compared with computer-generated moiré profilometry based on algebraic multiplication, this proposed method can reduce the effect of high frequency noise and residual DC component on measurement and improve the measurement accuracy. While compared with \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\pi$$\end{document}π phase shifting FTP, this method can measure more complex objects with better measurement capability. Experimental results verify the feasibility and validity of the proposed method.
- Published
- 2020
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