1. Plasma etched carbon microelectrode arrays for bioelectrical measurements
- Author
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Jeon G. Han, Tatiana Sukhanova, Shokoufeh Khakipoor, Sung-Il Kim, Sami Franssila, Anastasia Ludwig, Tomi Taira, Tiina Kaarela, Sari E. Lauri, Ville Jokinen, Henri J. Huttunen, Claudio Rivera, Joonas J. Heikkinen, Department of Chemistry and Materials Science, University of Helsinki, Institut national de la santé et de la recherche médicale, Albert-Ludwigs-Universität Freiburg, Sungkyunkwan University, Aalto-yliopisto, Aalto University, Veterinary Biosciences, Doctoral Programme in Clinical Veterinary Medicine, Doctoral Programme in Drug Research, Doctoral Programme in Biomedicine, Doctoral Programme Brain & Mind, Henri Juhani Huttunen / Principal Investigator, University Management, Neuroscience Center, Helsinki In Vivo Animal Imaging Platform (HAIP), Doctoral Programme in Integrative Life Science, Claudio Rivera Baeza / Principal Investigator, Molecular and Integrative Biosciences Research Programme, Synaptic Plasticity and Development, Physiology and Neuroscience (-2020), Synaptic Plasticity and Neuronal Synchronization, and Tomi Taira / Principal Investigator
- Subjects
Reactive ion etching ,Materials science ,Biocompatibility ,chemistry.chemical_element ,02 engineering and technology ,114 Physical sciences ,03 medical and health sciences ,DOPAMINE ,0302 clinical medicine ,THIN-FILMS ,Neuronal networks ,Materials Chemistry ,Electrical and Electronic Engineering ,Reactive-ion etching ,Thin film ,ta216 ,Neurons ,Plasma etching ,business.industry ,CHIP ,ICP-RIE ,Mechanical Engineering ,technology, industry, and agriculture ,General Chemistry ,Multielectrode array ,021001 nanoscience & nanotechnology ,Carbon ,Electronic, Optical and Magnetic Materials ,Microelectrode ,chemistry ,Electrode ,Optoelectronics ,0210 nano-technology ,business ,030217 neurology & neurosurgery - Abstract
Carbon-based materials have attracted much attention in biological applications like interfacing electrodes with neurons and cell growth platforms due to their natural biocompatibility and tailorable material properties. Here we have fabricated sputtered carbon thin film electrodes for bioelectrical measurements. Reactive ion etching (RIE) recipes were optimized with Taguchi method to etch the close field unbalanced magnetron sputtered carbon thin film (nanocarbon, nC) consisting of nanoscale crystalline sp(2)-domains in amorphous sp(3)-bonded backbone. Plasma etching processes used gas mixtures of Ar/O-2/SF6/CHF3 for RIE and O-2/SF6 for ICP-RIE. The highest achieved etch rate for nanocarbon was >> 389 nm/min and best chromium etch mask selectivity was 135:1. Biocompatibility of the material was tested with rat neuronal cultures. Next, we fabricated multielectrode arrays (MEA) with carbon recording electrodes and metal wiring. Organotypic brain slices grown on the MEAs were viable and showed characteristic spontaneous electrical network activity. The results demonstrate that interactions with nanocarbon substrate support neuronal survival and maturation of functional neuronal networks. Thus the material can have wide applications in biomedical research.
- Published
- 2018