1. Carbon nanotube forests as top electrode in electroacoustic resonators.
- Author
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Esconjauregui, Santiago, Makaryan, Taron, Mirea, Teona, DeMiguel-Ramos, Mario, Olivares, Jimena, Yuzheng Guo, Hisashi Sugime, D'Arsié, Lorenzo, Junwei Yang, Bhardwaj, Sunil, Cepek, Cinzia, Robertson, John, and Iborra, Enrique
- Subjects
ACOUSTIC resonators ,CARBON nanotubes ,CARBON electrodes ,ACOUSTOELECTRIC devices ,IRON catalysts ,PHOTOELECTRON spectroscopy ,CHEMICAL vapor deposition - Abstract
We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ~430, and at resonance of ~100. The effective coupling coefficient is of ~6%, and the resonant frequencies are up to ~800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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