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A Digital Loudspeaker Array (DLA) is an electro-mechanical transductor which receives a numerical signal as input data and allows the analogical conversion directly in the air. We designed PZT actuated membranes in order to obtain the highest acoustic pressure as possible. We built 256-MEMS-membranes DLAs using a generic PZT technology and digital acoustic reconstructions of the sound have been already demonstrated using our MEMS-DLA. In this paper, using FEM simulations, we evidence that residual stresses are responsible of the high distortion level measured on our demonstrators. A stress compensated technology was established using FEM approach. Acoustic characterization of stress compensated demonstrators proves distortion decreased and validates our hypothesis. [ABSTRACT FROM AUTHOR]

This paper reports on the development of a unique Digital Loudspeaker Array solution, based on Pb(Zr 0.52 ,Ti 0.48 )O 3 (PZT) thin-film actuated membranes, arranged in a matrix and which operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations were reported on 256 MEMS membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low-voltage. [ABSTRACT FROM AUTHOR]

This paper reports on the development of a unique Digital Loudspeaker Array solution, based on Pb(Zr 0.52 ,Ti 0.48 )O 3 (PZT) thin-film actuated membranes, arranged in a matrix and which operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations were reported on 256 MEMS membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low-voltage. [ABSTRACT FROM AUTHOR]