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A novel AlGaN/GaN/AlGaN double-heterostructure field effect transistor (DH-FET) structure with an inserted LT-AlGaN interlayer grown on 150 mm Si substrate has been studied. The DH-FET structure has been characterized by transmission electron microscopy (TEM), secondary ion mass spectrometry (SIMS) and X-ray diffraction (XRD). It is found that the inserted LT-AlGaN interlayer can further induce the compressive stress to compensate the tensile stress. Furthermore, the inserted LT-AlGaN interlayer acts as a dislocation filter to reduce threading dislocation propagation. These results indicate that the inserted LT-AlGaN interlayer plays an important role in the novel DH-FET structure.

A low-temperature (LT) AlGaN interlayer is inserted in the Al0.1Ga0.9N back barrier layer of an Al0.2Ga0.8N/GaN/Al0.1Ga0.9N double heterostructure grown on a 150 mm Si substrate. It is found that the 21-nm-thick LT-AlGaN interlayer plays an important role in stress relaxation and dislocation reduction of the Al0.1Ga0.9N back barrier layer, especially for screw dislocation reduction. In addition, a buffer breakdown voltage higher than 600 V is achieved, which is much higher than those of conventional heterostructures. These results demonstrate the effectiveness of combining the LT-AlGaN interlayer and the Al0.2Ga0.8N/GaN/Al0.1Ga0.9N double heterostructure on a Si substrate to increase the breakdown voltage for high-power applications.

An Al0.2Ga0.8N/GaN/Al0.1Ga0.9N double-heterostructure field effect transistor (DH-FET) structure was grown on a 150-mm-diameter Si substrate and the crystalline quality of the epitaxial material was found to be comparable to that of an Al0.2Ga0.8N/GaN single-heterostructure field effect transistor (SH-FET) structure. The fabricated DH-FET shows a lower buffer leakage current of 9.2 × 10−5 mA/mm and an improved off-state breakdown voltage of higher than 200 V, whereas the SH-FET shows a much higher buffer leakage current of 6.0 × 10−3 mA/mm and a lower breakdown voltage of 130 V. These significant improvements show that the Al0.2Ga0.8N/GaN/Al0.1Ga0.9N DH-FET is an effective structure for high-power electronic applications.