1. Characterization of Fe–Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process
- Author
-
Jin-Cherng Hsu, Shyong Lee, Jian-Jia Huang, Yung-Neng Cheng, Yen-Pei Fu, and Jian Yih Wang
- Subjects
Materials science ,Annealing (metallurgy) ,Lanthanum strontium manganite ,Scanning electron microscope ,Mechanical Engineering ,Metallurgy ,Alloy ,chemistry.chemical_element ,Electron microprobe ,engineering.material ,Condensed Matter Physics ,Microstructure ,Metal ,chemistry.chemical_compound ,Chemical engineering ,chemistry ,Mechanics of Materials ,visual_art ,visual_art.visual_art_medium ,engineering ,Lanthanum ,General Materials Science - Abstract
A Fe–Cr alloy, used for metallic interconnects, was coated with a protective layer of lanthanum strontium manganite (LSMO) using the aerosol deposition method (AD). The effects of the LSMO protective layer, which was coated on the Fe–Cr interconnects using AD, on the area specific resistance (ASR) during high temperature oxidation and the Cr evaporation behaviors were systematically investigated in this paper. The microstructures, morphologies, and compositions of the oxidized scales that appeared on the LSMO-coated Fe–Cr alloy after annealing at 800 °C for 750 h in air were examined using SEM equipped with EDS. The EPMA mapping of the LSMO-coated Fe–Cr interconnects undergoing long term, high-temperature oxidation was used to explain the formation layers of the oxidized scale, which consists of (Mn,Cr) 3 O 4 and Cr 2 O 3 layers. Moreover, the experimental results revealed that the AD process is a potential method for preparing denser protective layers with highly desirable electrical properties for metallic interconnects.
- Published
- 2014
- Full Text
- View/download PDF