1. Hydrogen content evaluation in hydrogenated nanocrystalline silicon and its amorphous alloys with germanium and carbon
- Author
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B.A. Najafov and V.R. Figarov
- Subjects
Materials science ,Hydrogen ,Silicon ,Renewable Energy, Sustainability and the Environment ,Inorganic chemistry ,Nanocrystalline silicon ,Energy Engineering and Power Technology ,chemistry.chemical_element ,Germanium ,Condensed Matter Physics ,Silane ,Nanocrystalline material ,chemistry.chemical_compound ,Fuel Technology ,chemistry ,Amorphous carbon ,Germane - Abstract
We evaluate the hydrogen content in hydrogenated amorphous germanium- and carbon- and also boron- and phosphorus-doped nanocrystalline silicon films obtained by a plasma chemical deposition technique. The films were made of a silicon-containing mixture (silane) heavily diluted with hydrogen and an inert gas (argon), and also methane and germane. In the study we use a combination of Infrared spectroscopy, recoil proton method and X-rays diffraction analysis. The hydrogen content is found to be as great as16 at% for the nanocrystalline films and 24 at% for the alloys. The hydrogen content in the alloys increases with the carbon concentration and decreases with germanium.
- Published
- 2010
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