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Presents a study which reported the results of ellipsometry measurements performed during the growth of hydrogenated amorphous silicon thin films on crystalline silicon substrates. Formation of low-density microstructure in the initial stages of growth; Effect of sputtering on the glow-discharge decomposition of gases; Discussion on the pseudodielectric function trajectories.

Presents information on a study which extended in situ ellipsometry characterization of the nucleation and microstrucutral evolution of amorphous silicon (a-Si:H) to the effect of deposition parameters on these processes. Details about the structural evolution of a-Si:H; Important aspects of the ellipsometer/glow-discharge reactor system; General features of in situ trajectories.

Presents information on a study which analyzed the in situ ellipsometry measurements taken during the deposition of hydrogenated amorphous silicon on crystalline silicon substrates in a convention rf glow-discharge apparatus. Nucleation behavior of hydrogenated amorphous silicon; Experimental details; Results and discussion; Conclusions.