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The vanadium oxide thin films are prepared on zinc selenide by DC magnet sputtering method. The optical character changing of vanadium oxide thin films are tested by CO2 laser, some phenomena is observed. The components are gotten by The X-ray photoelectron spectroscopy (XPS). The films are annealed to tune their components. A spectral transmittance study has been made from 2.5 μm to 25 μm. Vandium oxide thin film's transmittance under different CO2 laser power are measured. 80 mJ power can make the temperature of vanadium oxide thin films 5°C higher.

Vanadium dioxide is a kind of thermotropic phase transition material with the nearest phase transition temperature to the room temperature, which can be used in the laser protection area and Uncooled Microbolometer. VO 2 is prepared on ZnSe by magnetron sputtering method, and the optical character changing of different components vanadium oxide thin films are tested by Nicolet 8700 IR spectrometer. Some phenomena are observed. Because different components have different phase transition character, their phase transition temperatures are all lower than vanadium dioxide's 68°C. The energy band structure of vanadium oxide molecule is calculated by Material Studio, and the theoretic calculation explains how the components affect the phase transition temperature. Control the components of vanadium oxide by annealing, then adjust the phase transition temperature, and a new technique which changing the phase transition temperature without doping was found.