In this article, we report the fabrication and characterization of boron-doped diamond (B-diamond) Schottky diodes and MESFETs. Effects of annealing at 573–973 K on the electrical properties of these devices are investigated. Current density maximum for the as-fabricated Schottky diode is 0.05 A/cm2 at a gate voltage of −10.0 V. Annealing at 673 and 973 K makes it increase first to 0.70 A/cm2 and decrease lately to 0.07 A/cm2, respectively. ON/OFF ratios for the as-fabricated B-diamond Schottky diode exceed 4.5 × 108 at the OFF-voltage (VOFF) of 0 V and 3.2 × 106 at VOFF = 42.0 V. For the annealed Schottky diode, the ON/OFF ratios are higher than 1.7 × 106 at VOFF < 6.0} V. Ideality factor and barrier height for Au/Pt bilayer gates on the B-diamond channel layer range from 1.05 to 1.78 and from 1.24 to 1.56 eV, respectively. All three B-diamond MESFETs with the gate lengths of 12.0, 7.0, and 4.3 μm, respectively, operate with p-type channel characteristics. The drain current maxima for the as-fabricated MESFETs are −0.11, −0.16, and −0.39 mA/mm. After annealing at 773 K, these values increase to −0.17, −0.24, and −0.55 mA/mm. Annealing at 773 K also increases the extrinsic transconductance maxima for the three MESFETs from 11.1, 11.0, and 10.4μS/mm to 18.6, 16.2, and 14.4 μS/mm, respectively. [ABSTRACT FROM AUTHOR]