Author: "Paik J.C." / Topic: annealing -- analysis - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Paik J.C." Topic annealing -- analysis

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1. Transmission electron microscopy study of SiF+/BF2+ implanted and annealed (100)Si: amorphization and residual effects

Author: Kim, J.H., Lee, J.Y., Paik, J.C., and Kim, H.J.
Subjects: Electron microscopy -- Research, Annealing -- Analysis, Amorphous substances -- Analysis, Very-large-scale integration -- Analysis, Physics
Published: 1996

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